![PDF] Characterization of Palladium-based Thin Films Prepared by Plasma-enhanced Metalorganic Chemical Vapor Deposition | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/336934aa9c6d84b69b67156e071f2063ebc19717/3-Table2-1.png "PDF] Characterization of Palladium-based Thin Films Prepared by Plasma-enhanced Metalorganic Chemical Vapor Deposition | Semantic Scholar")
PDF] Characterization of Palladium-based Thin Films Prepared by Plasma-enhanced Metalorganic Chemical Vapor Deposition | Semantic Scholar
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